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OVERHAUL

전체 : 17

EDWARDS IF series
EDWARDS IH series
EDWARDS QDP series
LOT HD600
개발중
DRY PUMP
SLT623

TAIKO Peak speed
(L/min) Ultimate
vacuum(Torr)
SLT623 6,000 7.5x10^3
TAIKO
TRIC series

TAIKO Peak speed
(L/min) Ultimate
vacum(Troo)
TRIC1200 30,000 ~ 60,000 ~6.0x10^4
TRIC1800
TRIC3600
ALCATEL
ADS series

Peak speed
(L/min) Ultimate
vacuum(Torr)
ADP122 1,867 1.1x10^-2
ADS602 9,333 6.7x10^-4
ADS1202 19,167 6.7x10^-4
LOT
HD600S

Peak speed
(L/min) Ultimate
vacuum(Torr) Weight
(Kg) Dimensions
(mm)
HD600S 10,000 5.0x10^-3 300 887 x 365 x 662

KASHIYAMA
SDL series

	HZ	Peak speed (L/min)	Ultimate vacuum(Torr)	Weight (Kg)	Dimensions (mm)
SDL150	50	2,000	3x10^-2	325	950 x 440 x 492
SDL150	60	2,400	1.5x10^-2	325	950 x 440 x 492
SDL220	50	3,100	3x10^-2	450	960 x 524 x 606
SDL220	60	3,000	2.2x10^-2	450	960 x 524 x 606
SDL25K		25,000	3.8x10^-3	620	1000 x 520 x 1050
SDL40K		40,000	3.8x10^-3	750	1200 x 700 x 1250
SDL60K		55,000	3.8x10^-3	910	1180 x 750 x 1660

KASHIYAMA
MU series

Peak speed
(L/min) Ultimate
vacuum(Torr) Weight
(Kg) Dimensions
(mm)
MU100 1,660 1.1x10^-2 60 450 x 230 x 275
MU300 5,000 3.8x10^-3 100 450 x 230 x 520
MU600 10,000 3.8x10^-3 120 530 x 230 x 520
EDWARDS
IF series

HZ Peak speed
(L/min) Ultimate
vacuum(Torr) Weight
(Kg)
IF400
6,000 7.5x10^-3 550
IF1800 50 28,667 6x10^-4 580
IF1800 60 30,000 5x10^-4 580
IF30K
30,000 5x10^-4 750

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