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OVERHAUL

전체 : 17

  • EDWARDS IF series


  • EDWARDS IH series


  • EDWARDS QDP series


  • LOT HD600


  • 개발중


  • DRY PUMP
    SLT623

    TAIKOPeak speed
    (L/min)    		Ultimate
    vacuum(Torr)
    SLT6236,0007.5x10^3

  • TAIKO
    TRIC series

    TAIKOPeak speed
    (L/min)    		Ultimate
    vacum(Troo)
    TRIC120030,000 ~ 60,000~6.0x10^4
    TRIC1800
    TRIC3600

  • ALCATEL
    ADS series

    Peak speed
    (L/min)    		Ultimate
    vacuum(Torr)
    ADP1221,8671.1x10^-2
    ADS6029,3336.7x10^-4
    ADS120219,1676.7x10^-4

  • LOT
    HD600S

    Peak speed
    (L/min)    		Ultimate
    vacuum(Torr)    		Weight
    (Kg)    		Dimensions
    (mm)
    HD600S10,0005.0x10^-3300887 x 365 x 662

  • KASHIYAMA
    SDL series

    HZPeak speed
    (L/min)    		Ultimate
    vacuum(Torr)    		Weight
    (Kg)    		Dimensions
    (mm)
    SDL150502,0003x10^-2325950 x 440 x 492
    SDL150602,4001.5x10^-2325950 x 440 x 492
    SDL220503,1003x10^-2450960 x 524 x 606
    SDL220603,0002.2x10^-2450960 x 524 x 606
    SDL25K
    		25,0003.8x10^-36201000 x 520 x 1050
    SDL40K
    		40,0003.8x10^-37501200 x 700 x 1250
    SDL60K55,0003.8x10^-39101180 x 750 x 1660

  • KASHIYAMA
    MU series

    Peak speed
    (L/min)    		Ultimate
    vacuum(Torr)    		Weight
    (Kg)    		Dimensions
    (mm)
    MU1001,6601.1x10^-260450 x 230 x 275
    MU3005,0003.8x10^-3100450 x 230 x 520
    MU60010,0003.8x10^-3120530 x 230 x 520

  • EDWARDS
    IF series

    HZPeak speed
    (L/min)    		Ultimate
    vacuum(Torr)    		Weight
    (Kg)
    IF400
    		6,0007.5x10^-3550
    IF18005028,6676x10^-4580
    IF18006030,0005x10^-4580
    IF30K
    		30,0005x10^-4750
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