EDWARDS IF series
EDWARDS IH series
EDWARDS QDP series
LOT HD600
개발중
DRY PUMP
SLT623
TAIKO | Peak speed (L/min) | Ultimate vacuum(Torr) |
---|---|---|
SLT623 | 6,000 | 7.5x10^3 |
TAIKO
TRIC series
TAIKO | Peak speed (L/min) | Ultimate vacum(Troo) |
---|---|---|
TRIC1200 | 30,000 ~ 60,000 | ~6.0x10^4 |
TRIC1800 | ||
TRIC3600 |
ALCATEL
ADS series
Peak speed (L/min) | Ultimate vacuum(Torr) | |
---|---|---|
ADP122 | 1,867 | 1.1x10^-2 |
ADS602 | 9,333 | 6.7x10^-4 |
ADS1202 | 19,167 | 6.7x10^-4 |
LOT
HD600S
Peak speed (L/min) | Ultimate vacuum(Torr) | Weight (Kg) | Dimensions (mm) | |
---|---|---|---|---|
HD600S | 10,000 | 5.0x10^-3 | 300 | 887 x 365 x 662 |
KASHIYAMA
SDL series
HZ | Peak speed (L/min) | Ultimate vacuum(Torr) | Weight (Kg) | Dimensions (mm) | |
---|---|---|---|---|---|
SDL150 | 50 | 2,000 | 3x10^-2 | 325 | 950 x 440 x 492 |
SDL150 | 60 | 2,400 | 1.5x10^-2 | 325 | 950 x 440 x 492 |
SDL220 | 50 | 3,100 | 3x10^-2 | 450 | 960 x 524 x 606 |
SDL220 | 60 | 3,000 | 2.2x10^-2 | 450 | 960 x 524 x 606 |
SDL25K | 25,000 | 3.8x10^-3 | 620 | 1000 x 520 x 1050 | |
SDL40K | 40,000 | 3.8x10^-3 | 750 | 1200 x 700 x 1250 | |
SDL60K | 55,000 | 3.8x10^-3 | 910 | 1180 x 750 x 1660 |
KASHIYAMA
MU series
Peak speed (L/min) | Ultimate vacuum(Torr) | Weight (Kg) | Dimensions (mm) | |
---|---|---|---|---|
MU100 | 1,660 | 1.1x10^-2 | 60 | 450 x 230 x 275 |
MU300 | 5,000 | 3.8x10^-3 | 100 | 450 x 230 x 520 |
MU600 | 10,000 | 3.8x10^-3 | 120 | 530 x 230 x 520 |
EDWARDS
IF series
HZ | Peak speed (L/min) | Ultimate vacuum(Torr) | Weight (Kg) | |
---|---|---|---|---|
IF400 | 6,000 | 7.5x10^-3 | 550 | |
IF1800 | 50 | 28,667 | 6x10^-4 | 580 |
IF1800 | 60 | 30,000 | 5x10^-4 | 580 |
IF30K | 30,000 | 5x10^-4 | 750 |